| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a processing method of a plate-like object capable of highly accurately flattering a plate-like object having irregularities on its surface. <P>SOLUTION: A processing method of a plate-like object for grinding or polishing the rear surface of a plate-like object having irregularities on its surface comprises: a first protective tape sticking step of sticking a first protective tape composed of a first base material and a first glue layer to the surface of the plate-like object and absorbing the irregularities with the first glue layer; a second protective tape sticking step of sticking a second protective tape composed of a second base material harder than the first base material and a second glue layer onto the first protective tape of a workpiece to which the first protective tape was stuck and alleviating undulation of the first protective tape by absorbing the undulation with the second glue layer of the second protective tape; and a processing step of holding the second protective tape side of the plate-like object to which the first and second protective tapes were stuck with a chuck table and grinding or polishing the rear surface of the plate-like object. <P>COPYRIGHT: (C)2012,JPO&INPIT |
