| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently clean a top face (base mounting face) of a base holding member. <P>SOLUTION: A cleaning unit 40 is carried to a position where the peripheral face of a sticky roller 42 abuts on the base mounting face by a base carrying-in apparatus. The cleaning unit 40 is relatively moved to an X-axis direction with respect to a base holder 50 by a base carrying-out apparatus, whereby dust on the base mounting face adheres to the sticky roller 42 to be removed. The cleaning unit 40 is carried to a position where the peripheral face of the sticky roller 42 is separate from the base mounting face by the base carrying-out apparatus. Accordingly, hands are not required for cleaning the base mounting face, and the cleaning efficiency is excellent. <P>COPYRIGHT: (C)2012,JPO&INPIT |
