| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray measuring device and an X-ray measuring method which can reduce or remove a shielding body and improve S/N ratio. <P>SOLUTION: Among X-ray detection data, detection data corresponding to time when an X-ray 4 is generated at a collision point 9 are enabled, and other data are disabled to generate X-ray waveforms. For instance, if laser light 3 is pulse laser light, and an electron beam 1 is either a continuous beam or a pulsed electron beam with pulse width the same as or longer than that of the pulse laser light, the laser light 3 is detected, the X-ray detection data and laser light detection data are multiplied with a time axis matched concerning the collision point 9 to generate the X-ray waveforms. <P>COPYRIGHT: (C)2012,JPO&INPIT |
