| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve electrical characteristics in a wiring structure. <P>SOLUTION: A method for manufacturing graphene wiring comprises the steps of: forming a wiring groove 30 in an insulating film 13; forming a catalyst film 14 on the entire surface in the wiring groove; and forming, on the catalyst layer in the wiring groove, a graphene layer 16 composed of a plurality of graphene sheets 16a-16e laminated in a direction perpendicular to the bottom of the wiring groove. <P>COPYRIGHT: (C)2012,JPO&INPIT |
