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发明名称
摘要
申请公布号
JP4918959(B2)
申请公布日期
2012.04.18
申请号
JP20020524218
申请日期
2001.08.30
申请人
发明人
分类号
H01L21/28;H01L21/8242;H01L21/3205;H01L21/60;H01L21/768;H01L21/84;H01L23/52;H01L27/108;H01L27/12;H01L29/417;H01L29/786
主分类号
H01L21/28
代理机构
代理人
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