发明名称 PATTERNING NANO-SCALE PATTERNS ON A FILM COMPRISING UNZIPPING POLYMER CHAINS
摘要 The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g. thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g. into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain.
申请公布号 EP2440976(A1) 申请公布日期 2012.04.18
申请号 EP20100728900 申请日期 2010.06.11
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DUERIG, URS T;FROMMER, JANE ELIZABETH;GOTSMANN, BERND W;HEDRICK, JAMES LUPTON;KNOLL, ARMIN W;MILLER, ROBERT DENNIS;PIRES, DAVID SANTOS;WADE, CHARLES GORDON
分类号 G03F7/00;C08G2/06;C08G2/14;G01Q80/00 主分类号 G03F7/00
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