发明名称 |
PATTERNING NANO-SCALE PATTERNS ON A FILM COMPRISING UNZIPPING POLYMER CHAINS |
摘要 |
The invention concerns a method for patterning a surface of a material. A substrate having a polymer film thereon is provided. The polymer is a selectively reactive polymer (e.g. thermodynamically unstable): it is able to unzip upon suitable stimulation. A probe is used to create patterns on the film. During the patterning, the film is locally stimulated for unzipping polymer chains. Hence, a basic idea is to provide a stimulus to the polymeric material, which in turn spontaneously decomposes e.g. into volatile constituents. For example, the film is thermally stimulated in order to break a single bond in a polymer chain, which is sufficient to trigger the decomposition of the entire polymer chain. |
申请公布号 |
EP2440976(A1) |
申请公布日期 |
2012.04.18 |
申请号 |
EP20100728900 |
申请日期 |
2010.06.11 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
DUERIG, URS T;FROMMER, JANE ELIZABETH;GOTSMANN, BERND W;HEDRICK, JAMES LUPTON;KNOLL, ARMIN W;MILLER, ROBERT DENNIS;PIRES, DAVID SANTOS;WADE, CHARLES GORDON |
分类号 |
G03F7/00;C08G2/06;C08G2/14;G01Q80/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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