发明名称 |
METHOD AND SYSTEM FOR HEATING A TIP APEX OF A CHARGED PARTICLE SOURCE |
摘要 |
<p>Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.</p> |
申请公布号 |
EP2441083(A1) |
申请公布日期 |
2012.04.18 |
申请号 |
EP20100737667 |
申请日期 |
2010.05.28 |
申请人 |
CARL ZEISS NTS, LLC. |
发明人 |
NOTTE IV, JOHN A.;PERCIVAL, RANDY;RAHMAN, MILTON;BARRISS, LOUISE;MELLO, RUSS;DIMANNA, MARK D. |
分类号 |
H01J1/15;G05D23/27 |
主分类号 |
H01J1/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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