METHOD FOR FABRICATING MICRO- OR NANO-SIZED PATTERNS USING LIQUID CRYSTAL PHASE AND DEFECT STRUCTURE THEREOF
摘要
PURPOSE: A method for forming a micro or nano pattern using a liquid crystal phase or a coupling structure is provided to quickly form a pattern by high mobility of liquid crystals. CONSTITUTION: A surface is processed to adjust orientation of liquid crystal molecules on a substrate. A liquid crystal molecular layer is formed in a substrate. A regular structure is formed on the liquid crystal molecular layer according to a phase structure of the liquid crystal molecules. The regular structure is formed on a photoresist by micro or nano patterns using a photo mask.
申请公布号
KR20120036178(A)
申请公布日期
2012.04.17
申请号
KR20100097903
申请日期
2010.10.07
申请人
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
JUNG, HEE TAE;KIM, YUN HO;JEONG, HYEON SU;YOON, DONG KI