发明名称 |
Integrated circuit system employing backside energy source for electrical contact formation |
摘要 |
A method for manufacturing an integrated circuit system includes: providing a first material; forming a second material over a first side of the first material; and exposing a second side of the first material to an energy source to form an electrical contact at an interface of the first material and the second material. |
申请公布号 |
US8158513(B2) |
申请公布日期 |
2012.04.17 |
申请号 |
US20080247479 |
申请日期 |
2008.10.08 |
申请人 |
MAI ZHIHONG;TOH SUEY LI;TAN PIK KEE;LAM JEFFREY C.;HSIA LIANG-CHOO;GLOBALFOUNDRIES SINGAPORE PTE. LTD. |
发明人 |
MAI ZHIHONG;TOH SUEY LI;TAN PIK KEE;LAM JEFFREY C.;HSIA LIANG-CHOO |
分类号 |
H01L21/44 |
主分类号 |
H01L21/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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