发明名称 Integrated circuit system employing backside energy source for electrical contact formation
摘要 A method for manufacturing an integrated circuit system includes: providing a first material; forming a second material over a first side of the first material; and exposing a second side of the first material to an energy source to form an electrical contact at an interface of the first material and the second material.
申请公布号 US8158513(B2) 申请公布日期 2012.04.17
申请号 US20080247479 申请日期 2008.10.08
申请人 MAI ZHIHONG;TOH SUEY LI;TAN PIK KEE;LAM JEFFREY C.;HSIA LIANG-CHOO;GLOBALFOUNDRIES SINGAPORE PTE. LTD. 发明人 MAI ZHIHONG;TOH SUEY LI;TAN PIK KEE;LAM JEFFREY C.;HSIA LIANG-CHOO
分类号 H01L21/44 主分类号 H01L21/44
代理机构 代理人
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