| 摘要 |
PURPOSE: A substrate separation module and a substrate separation apparatus are provided to independently control expansion pressure of a diaphragm for each section, thereby uniformly separating a substrate from a tray regardless of properties of an adhesive member. CONSTITUTION: A substrate separation part(130) is extended from a buffer part. The substrate separation part includes a diaphragm on an extended end part. The substrate separation part separates a substrate by expanding the diaphragm. Fluid supply parts(141,142,143) supply fluids to the inside of the buffer part. A controller(151) separately controls supply conditions of the fluids supplied to each chamber from the fluid supply parts.
|
