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发明名称
OPTISCHES ELEMENT, LITHOGRAFIEVORRICHTUNG MIT DERARTIGEM OPTISCHEN ELEMENT UND VERFAHREN ZUR HERSTELLUNG EINES BAUELEMENTS
摘要
申请公布号
AT552519(T)
申请公布日期
2012.04.15
申请号
AT20090715126T
申请日期
2009.02.24
申请人
ASML NETHERLANDS B.V.
发明人
SOER, WOUTER;BANINE, VADIM;MOORS, JOHANNES;VAN HERPEN, MAARTEN;YAKURIN, ANDREY
分类号
G02B5/20;G02B5/08;G02B5/22;G02B5/26;G03F7/20;G21K1/06
主分类号
G02B5/20
代理机构
代理人
主权项
地址
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