CERAMIC SUBSTRATE, METHOD FOR MANUFACTURING THE SAME, AND SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To achieve compatibility between a dielectric breakdown voltage and a thermal conductivity of a ceramic substrate.

SOLUTION: A mixture containing aspheric ceramic particles and ceramic particles having a smaller particle size is formed and calcined, after giving fixed directionality to the aspheric ceramic particles in the mixture. Hereby, this ceramic substrate 11 is obtained, which has a crystal structure 11b containing aspheric ceramic crystal particles 11a, wherein the center particle diameter of a particle size distribution on a first surface is 10-60 μm and the center particle diameter of a particle size distribution on a second surface orthogonal to the first surface is 5-30 μm, and which is excellent both in the dielectric breakdown voltage and in the thermal conductivity.

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