发明名称 METHOD OF MANUFACTURING DISPLAY DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To reduce periodic appearance unevenness in a liquid crystal display panel having an insulation layer formed by exposing and developing a photosensitive insulation film. <P>SOLUTION: A method of manufacturing a display device includes a process for forming an insulation layer produced by exposing and developing a photosensitive insulation film. With the method, by applying a plurality of exposure patterns generated by numerical control based on numerical data prepared in advance simultaneously at different locations of the photosensitive insulation film and scanning the plurality of exposure patterns exclusively, the entire photosensitive insulation film is exposed. In an area that is determined not to be exposed based on the numerical data, light of the amount equal to or larger than the maximum value among the total amount of leakage light applied at each location of the photosensitive insulation film under a condition in which no light is applied homogeneously. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012073420(A) 申请公布日期 2012.04.12
申请号 JP20100218221 申请日期 2010.09.29
申请人 HITACHI DISPLAYS LTD;PANASONIC LIQUID CRYSTAL DISPLAY CO LTD 发明人 TOJO TOSHIO;RIN SHINAN
分类号 G03F7/20;G02F1/1368;G09F9/00;G09F9/30;H01L21/027 主分类号 G03F7/20
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