发明名称 Nonvolatile memory device and manufacturing method of the same
摘要 PURPOSE: A nonvolatile memory device and a manufacturing method of the same are provided to form junction areas having various depths by forming a barrier dummy pattern as well as a driving gate around a semiconductor substrate. CONSTITUTION: A semiconductor substrate(101) comprises a cell array region and a peripheral area. A first gate pattern(G) is formed around a semiconductor substrate. The first gate pattern comprises a first pattern(G1) and a second pattern(G2) on both sides of the first pattern. The gate pattern is formed on the cell array of the semiconductor substrate. The second gate pattern includes a drain select gate, a source select gate and a cell gate.
申请公布号 KR101129159(B1) 申请公布日期 2012.04.12
申请号 KR20090045402 申请日期 2009.05.25
申请人 发明人
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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