| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable, in magnetic disk inspection, the total process of inspecting both faces of magnetic disks taken out of a cassette, classifying the disks into grades according to the result of inspection, and returning the classified disks into the cassette to be accomplished in an environment of low dust generation while keeping the throughput high. <P>SOLUTION: A plurality of uninspected substrates housed in a cassette are taken out of the cassette, are mounted on a plurality of rotational drives in a plurality of substrate take-out/feed positions of a magnetic disk inspection device, and are transported to a plurality of inspection positions, where the plurality of substrates are irradiated with light for optical inspection while being rotated by the plurality of rotational drives; the optically inspected plurality of substrates are transported to the plurality of substrate take-out/feed positions, where the transported plurality of substrates are taken out and housed into the cassette for housing inspected substrates by classifying into grades according to the result of optical inspection. <P>COPYRIGHT: (C)2012,JPO&INPIT |
