发明名称 Thermal Compressive Bond Head
摘要 A method includes allowing a work piece having a solder bump to contact a bond head; heating the bond head until the solder bump is melted; and conducting a cooling media into the bond head to cool the solder bump and to solidify the solder bump.
申请公布号 US2012088362(A1) 申请公布日期 2012.04.12
申请号 US20100901273 申请日期 2010.10.08
申请人 HWANG CHIEN LING;LIN CHENG-CHUNG;HUANG YING-JUI;LIU CHUNG-SHI;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 HWANG CHIEN LING;LIN CHENG-CHUNG;HUANG YING-JUI;LIU CHUNG-SHI
分类号 H01L21/768 主分类号 H01L21/768
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