COATING APPARATUS AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique in which the heterogeneity of the film thickness of an applied coating liquid can be improved.

SOLUTION: The coating apparatus includes: a nozzle which discharges the coating liquid; a nozzle moving mechanism which makes the nozzle move to the substrate; a coating solution supply part which supplies the coating liquid to the nozzle; a connecting tube which is connected with the nozzle in order to supply the coating liquid to the nozzle, and deforms following the moving of the nozzle by the nozzle moving mechanism; a flow rate measuring part which measures the flow rate of the coating liquid supplied toward the nozzle from the coating solution supply part; an opening adjustment part which accommodates the opening of a coating liquid flow passage which leads to the nozzle from the coating solution supply part; and an opening regulating control part which controls the opening adjustment part based on the measurement result of the flow rate measuring part. The opening regulating control part controls the opening adjustment part to maintain the opening accommodated during stopping the nozzle when the nozzle moves, and discharges the coating liquid on the surface of the substrate.

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