| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a disk-like substrate in which a common spacer can be used in both of a step of polishing the outer peripheral end surface of a disk-like substrate and a step of polishing the inner peripheral end surface thereof and which can improve productivity of the disk-like substrate. <P>SOLUTION: A manufacturing method of a disk-like substrate includes: a lamination step for interposing a spacer 110 between glass substrates 10 and laminating them together; an inner periphery polishing step for polishing the inner peripheral end surface of the glass substrates 10; and an outer periphery polishing step for polishing the outer peripheral end surface of the glass substrates 10 while maintaining a lamination state after the inner peripheral end surface polishing step. For the spacer 110, relations expressed by following formulas (1): r2>R2+Cin, (2): r1<R1-Cout, and (3): r1+r2<R1+R2-Cout are satisfied where the outer radius of the glass substrate 10 is R1, the inner radius of the same is R2, the outer diametral chamfer length of the same is Cout, the inner diametral chamfer length of the same is Cin, the outer radius of the spacer 110 is r1, and the inner radius of the same is r2. <P>COPYRIGHT: (C)2012,JPO&INPIT |
