| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately construct a three-dimensional image. <P>SOLUTION: An arithmetic processing circuit 34 measures a moving position in a Z direction by a Z-axis driving mechanism 54 every time when scanning of one line in an X-direction is finished, of two-dimensional scanning, and calculates output adjustment data by using an adjustment data table according to the measurement result to store the output adjustment data in a table holding section 28. An output adjustment circuit 30 adjusts intensity of laser light emitted from a light source 21 based on an output adjustment signal obtained by performing D/A conversion for the output adjustment data. Accordingly, a two-dimensional image with good contrast can be acquired to accurately construct a three-dimensional image. This invention can be applied to, for example, a scanning type microscope performing three-dimensional scanning by simultaneously performing the two-dimensional scanning in XY directions and movement in the Z direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
