发明名称 |
Composition to reduce adhesion between a conformable region and a mold |
摘要 |
An imprint lithography mold assembly includes a mold having a surface, a substrate having a surface, and a polymerizable composition disposed between the surface of the mold and the surface of the substrate. The polymerizable composition includes a bulk material and a non-ionic surfactant having a first end and a second end. The first end of the non-ionic surfactant has an affinity for the bulk material, and the second end of the non-ionic surfactant is fluorinated. |
申请公布号 |
US8152511(B2) |
申请公布日期 |
2012.04.10 |
申请号 |
US20090404024 |
申请日期 |
2009.03.13 |
申请人 |
XU FRANK Y.;MILLER MICHAEL N.;MOLECULAR IMPRINTS, INC. |
发明人 |
XU FRANK Y.;MILLER MICHAEL N. |
分类号 |
B29C33/62;B29C59/02 |
主分类号 |
B29C33/62 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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