发明名称 Cylindrical high-pressure treating device
摘要 The present invention relates to a cylindrical high-pressure treatment apparatus, including an inner chamber which opens and closes vertically so as to provide a cylindrical treatment-space portion, an outer chamber which opens and closes laterally so as to ensure that the inner chamber is airtight when closed, an inner-chamber-driving unit for opening and closing the inner chamber vertically, an outer-chamber-driving unit for opening and closing the outer chamber laterally, and a supporting frame which fixes and supports one side of the inner chamber, the inner-chamber-driving unit, and the outer-chamber-driving unit. The cylindrical high-pressure treatment apparatus of the present invention does not use a door to open and close the chamber, but rather divides the chamber into upper and lower portions and moves the upper and lower chambers so as to open or seal the treatment chamber. Thus, the inner space of the treatment chamber, in which high-pressure treatment is performed, can be formed into a perfectly cylindrical shape. Therefore, by preventing high pressure from being concentrated at a specific location, the leakage prevention properties of the apparatus may be improved, a reduction in the service life of the apparatus may be prevented, and the safety of the apparatus may be improved.
申请公布号 KR101133017(B1) 申请公布日期 2012.04.09
申请号 KR20100043660 申请日期 2010.05.10
申请人 发明人
分类号 F26B5/14;B08B7/00;H01L21/302 主分类号 F26B5/14
代理机构 代理人
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