IMPRINT APPARATUS

摘要

PURPOSE: An imprint device is provided to enhance imprint quality since bubble is smoothly discharged to the outside of the adhered surface of a substrate and a stamp. CONSTITUTION: An imprint device comprises a stage(2), a stamp(4), a division fixing unit(6), and a division control unit(8). A substrate(G) is placed on the loading surface(F) of the stage. The imprint surface(S1) of the stamp faces the substrate on the stage. The stamp is arranged in on the stage. The chuck members(C) of the division fixing unit divide the entire back side of the imprint surface on the stamp and fix the divided surfaces respectively. The division control unit controls the operating state of the chuck members of the division fixing unit respectively.