发明名称 MELT GAP MEASURING APPRATUS AND SINGLE CRYSTAL GROWER INCLUDING THE SAME
摘要 PURPOSE: A melt gap measurement apparatus and a single crystal growth apparatus are provided to monitor a section which is not able to be monitored with naked eye during a tailing process using a reflector, thereby improving a yield of a large-diameter silicon single crystal. CONSTITUTION: A combining part(172) is combined with a heat shield part of a single crystal growth apparatus. A reflection part(174) is extended and formed on the lower end of the combining part. The reflection part includes a body part made of quartz an external reflective metal layer which covers the body part. The combining part and the reflection part are formed with the same material. A bottom part(176) is formed by being extended from the lower end of the reflection part.
申请公布号 KR20120032787(A) 申请公布日期 2012.04.06
申请号 KR20100094310 申请日期 2010.09.29
申请人 LG SILTRON INCORPORATED 发明人 KIM, DO YEON;CHOI, IL SOO;KIM, BONG WOO
分类号 C30B15/00;C30B29/06;G09F19/16;H01L21/02 主分类号 C30B15/00
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