发明名称 |
MELT GAP MEASURING APPRATUS AND SINGLE CRYSTAL GROWER INCLUDING THE SAME |
摘要 |
PURPOSE: A melt gap measurement apparatus and a single crystal growth apparatus are provided to monitor a section which is not able to be monitored with naked eye during a tailing process using a reflector, thereby improving a yield of a large-diameter silicon single crystal. CONSTITUTION: A combining part(172) is combined with a heat shield part of a single crystal growth apparatus. A reflection part(174) is extended and formed on the lower end of the combining part. The reflection part includes a body part made of quartz an external reflective metal layer which covers the body part. The combining part and the reflection part are formed with the same material. A bottom part(176) is formed by being extended from the lower end of the reflection part.
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申请公布号 |
KR20120032787(A) |
申请公布日期 |
2012.04.06 |
申请号 |
KR20100094310 |
申请日期 |
2010.09.29 |
申请人 |
LG SILTRON INCORPORATED |
发明人 |
KIM, DO YEON;CHOI, IL SOO;KIM, BONG WOO |
分类号 |
C30B15/00;C30B29/06;G09F19/16;H01L21/02 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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地址 |
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