发明名称 MEASURING APPARATUSES AND DEVICES FOR SPECTROSCOPICALLY EXAMINING SAMPLES
摘要 The invention relates to a measuring apparatus, which comprises a cavity (34) extending in a longitudinal direction (36), a first opening (35), which is to face a sample, a plurality of second openings (31) for detecting light coming from the sample, and at least one third opening (33) for coupling light into the cavity. Such a measuring apparatus is suitable in particular for spectroscopically examining planar samples.
申请公布号 WO2012042015(A1) 申请公布日期 2012.04.05
申请号 WO2011EP67100 申请日期 2011.09.30
申请人 CARL ZEISS MICROIMAGING GMBH;MARGRAF, JOERG;CORRENS, NICO 发明人 MARGRAF, JOERG;CORRENS, NICO
分类号 G01N21/47;G01J1/04 主分类号 G01N21/47
代理机构 代理人
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