发明名称 PROCESSING DEVICE AND MAINTENANCE METHOD THEREOF
摘要 PURPOSE: A processing apparatus and a maintenance method thereof are provided to easily separate objects such as a shower head by performing maintenance work for a cover in a completely reversed state. CONSTITUTION: A slide device(140) slides a cover(62). The slide device comprises a guide rail(120), a slider(101), and a slide motor(102). A lifting device(150) lifts the cover. A rotation device(160) rotates the cover in a vertical direction. A rotary motor(106) of the rotation device is fixed to a movable body(104).
申请公布号 KR20120032435(A) 申请公布日期 2012.04.05
申请号 KR20110097304 申请日期 2011.09.27
申请人 TOKYO ELECTRON LIMITED 发明人 HONMA TORU;ITAYA TAKEHIKO
分类号 H01L21/02;B01J3/03 主分类号 H01L21/02
代理机构 代理人
主权项
地址