| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that it is necessary to maintain and control a relation among a focus position of an X-ray, a sample surface, and a rotational shaft at an accuracy of 1 μm or less while changing an incident angle, in order to measure a film thickness of a minute area with an X-ray reflectivity method by using an incident X-ray having a beam size of 10 μm or less. <P>SOLUTION: An X-ray lens is used as an amplitude division beam splitter and a light condensing optical system in the present invention. The X-ray refracted by the X-ray lens gives an angle distribution in which the X-ray is focused in a size of 10 μm or less at a focal point. A thin film laminate is disposed at the focal point. An object wave which is a mirror-reflected X-ray and a reference wave which is an X-ray transmitted through the X-ray lens are superposed and interfered with each other by using the X-ray lens disposed downstream of the thin film laminate. A phase of the reflection X-ray is analyzed based on an interval and position of interference fringes reflecting an optical path difference and a phase difference generated in the thin film laminate, and the film thickness of the minute area is measured and inspected. <P>COPYRIGHT: (C)2012,JPO&INPIT |
