发明名称 RESIN SEALED MOLDING DIE APPARATUS AND OUTSIDE AIR CUTOFF MEMBER FOR THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a resin sealed molding die apparatus for which compression molding and deaeration molding can be carried out in combination and which permits a stroke of a pressure member to be increased at a resin compression time, and an outside air cutoff member for the resin sealed molding die apparatus. <P>SOLUTION: A resin sealed molding die apparatus 10 includes an outside air cutoff member 16 for forming a sealed space around the periphery of a lower die 12, which is divided into an outer cylinder 161 and an inner cylinder 162, the two of which are slid each other in a vertical direction to change the height of the outside air cutoff member 16. Therefore, the resin sealed molding die apparatus 10 allows the height of the outside air cutoff member 16 to be changed according to the movement of a pressure member 17 at a resin compression time, thereby making it possible to secure an increased stroke of the pressure member 17 at the resin compression time. As a result, the thickness of a resin mold can be increased. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012069719(A) 申请公布日期 2012.04.05
申请号 JP20100213051 申请日期 2010.09.24
申请人 TOWA CORP 发明人 KO TAKEAKI
分类号 H01L21/56 主分类号 H01L21/56
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