发明名称 |
METHOD FOR MANUFACTURING AN OXIDE THIN FILM |
摘要 |
A method for manufacturing an oxide thin film comprises: providing a coating material composed of a first precursor material, a fuel material and a solvent; coating the coating material on a substrate; and annealing the coated coating material on the substrate to convert the coated coating material into an oxide thin film.
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申请公布号 |
US2012082782(A1) |
申请公布日期 |
2012.04.05 |
申请号 |
US201113083299 |
申请日期 |
2011.04.08 |
申请人 |
WU JIH-JEN;WU WEI-TING;WANG CHING-MEI;CHEN JEN-SUE;NATIONAL CHENG KUNG UNIVERSITY |
发明人 |
WU JIH-JEN;WU WEI-TING;WANG CHING-MEI;CHEN JEN-SUE |
分类号 |
B05D3/02;B05D5/00;B05D7/00 |
主分类号 |
B05D3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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