发明名称 |
MEMORY CELL COMPRISING NON-SELF-ALIGNED HORIZONTAL AND VERTICAL CONTROL GATES |
摘要 |
The present disclosure relates to a memory cell comprising a vertical selection gate extending in a trench made in a substrate, a floating gate extending above the substrate, and a horizontal control gate extending above the floating gate, wherein the floating gate also extends above a portion of the vertical selection gate over a non-zero overlap distance. Application mainly to the production of a split gate memory cell programmable by hot-electron injection. |
申请公布号 |
US2015117117(A1) |
申请公布日期 |
2015.04.30 |
申请号 |
US201414528785 |
申请日期 |
2014.10.30 |
申请人 |
STMicroelectronics (Rousset) SAS |
发明人 |
La Rosa Francesco;Niel Stephan;Delalleau Julien;Regnier Arnaud |
分类号 |
H01L27/115;H01L21/3205;H01L29/788;H01L29/423;H01L29/66;H01L29/78;G11C16/14;H01L21/3213 |
主分类号 |
H01L27/115 |
代理机构 |
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代理人 |
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主权项 |
1. A memory cell, comprising:
a vertical selection gate extending in a trench made in a semiconductor substrate a floating gate extending on the substrate; a horizontal control gate extending above the floating gate, wherein the floating gate has a protuberance which extends beneath an upper surface of the substrate; and a first dielectric layer positioned within the substrate and between the protuberance of the floating gate and the vertical selection gate. |
地址 |
Rousset FR |