| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that characteristics of conventional thin film dielectrics deteriorate in accordance with a reduced film thickness. <P>SOLUTION: A thin film dielectric with a nano granular structure has the following composition and structure. (A) Composition: having a general formula Fe<SB POS="POST">a</SB>Co<SB POS="POST">b</SB>Ni<SB POS="POST">c</SB>M<SB POS="POST">w</SB>N<SB POS="POST">x</SB>O<SB POS="POST">y</SB>F<SB POS="POST">z</SB>, in the formula, an M component is Mg, Al, Si, Ti, Y, Zr, Nb, Hf and/or Ta, composition ratios a, b, c, w, x, y and z are, in atomic ratio (%), satisfy 0≤a≤60, 0≤b≤60, 0≤c≤60, 10<a+b+c<60, 10≤w≤50, 0≤x≤50, 0≤y≤50, 0≤z≤50, 20≤x+y+z≤70 and a+b+c+w+x+y+z=100. (B) Structure: comprising Fe, Co and/or Ni, while nm-size metal granules are dispersed in an insulation matrix comprising the M component and at least one selected among N, O and F. <P>COPYRIGHT: (C)2012,JPO&INPIT |
