ELECTRONIC COMPONENT, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC DEVICE INCLUDING ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To lower the height while suppressing the degradation of characteristics.

SOLUTION: An electronic component of the invention includes: a serial resonator 12 and a parallel resonator 14 provided on a piezoelectric substrate 10; signal wiring 20 provided on the piezoelectric substrate 10 and electrically connected with the serial resonator 12 and the parallel resonator 14; a metal plate 28 having a cavity 32 on an electrode finger of an interdigital electrode 18 of the serial resonator 12 and the parallel resonator 14 and provided so as to cover the upper surface of the cavity 32; a support column 30 provided on a part not positioned on the signal wiring 20 on the piezoelectric substrate 10, for supporting the metal plate 28; and an insulation part 34 covering the metal plate 28 and the support column 30 and being in contact with the side face of the cavity 32.

COPYRIGHT: (C)2012,JPO&INPIT