COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, AND POLYMER

摘要

The present invention provides a composition for forming a liquid immersion upper layer film, which comprises [A] a polymer component comprising a polymer (A1) and [B] a solvent, wherein the polymer (A1) has a structural unit (I) containing a group represented by formula (i). Preferably, the structural unit (I) is a structural unit (I-1) represented by formula (1). Preferably, the polymer component [A] additionally has a structural unit (II-1) represented by formula (2) which is contained in the polymer (A1) or in an additional polymer that is different from the polymer (A1). Preferably, the polymer component [A] additionally has a carboxyl-group-containing structural unit (III) which is contained in the polymer (A1) or in an additionally polymer that is different from the polymer (A1).