发明名称 METHOD OF INSPECTING SEMICONDUCTOR DEVICE
摘要 Reliability of a semiconductor device is improved. In a flatness inspection of BGA (semiconductor device), there is formed a flatness standard where a permissible range in the direction of (+) of flatness at normal temperature is smaller than a permissible range in the direction of (−). With use of the above flatness standard, a flatness inspection of the semiconductor device at normal temperature is performed to determine whether the mounted item is non-defective or defective. With the above process, defective mounting caused by a package warp when heated during reflow soldering etc. is reduced and reliability of BGA is improved. At the same time, flatness management of a substrate-type semiconductor device with better consideration of a mounting state can be performed.
申请公布号 US2012081702(A1) 申请公布日期 2012.04.05
申请号 US201113244434 申请日期 2011.09.24
申请人 YAMADA SATOSHI;KARASHIMA TAKASHI;HIRONAGA KENYA;YASUNAGA MASATOSHI;FUJIMOTO YUJI;RENESAS ELECTRONICS CORPORATION 发明人 YAMADA SATOSHI;KARASHIMA TAKASHI;HIRONAGA KENYA;YASUNAGA MASATOSHI;FUJIMOTO YUJI
分类号 G01N21/00 主分类号 G01N21/00
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