| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a susceptor for effectively venting emitted gas such as silicon oxide, carbon monoxide and/or carbon dioxide generated by reaction between the susceptor and a silica crucible at a high temperature in manufacturing of silicon monocrystals by the Czochralski method. <P>SOLUTION: The susceptor 44 for holding the silica crucible for melting silicon charge includes an approximately bowl-shaped structure having a size capable of accepting the crucible on the lower part, the structure has an inner surface 52 extended to the upper part of the upper portion of the crucible, a plurality of grooves 46, 48, 50 are formed on the inner surface 52 of the structure, gas released from the outer surface of the crucible when the susceptor 44 and the crucible are heated is allowed to rise through the plurality of grooves 46, 48, 50 and exhausted from an upper open end. The grooves and the open end may be formed on the outer surface of the silica crucible. <P>COPYRIGHT: (C)2012,JPO&INPIT |
