发明名称 |
STRUCTURE OF SUBSTRATE SUPPORTING TABLE, AND PLASMA PROCESSING APPARATUS |
摘要 |
Disclosed is the structure of a substrate supporting table wherein corrosion of a bellows is eliminated, generation of dusts from the bellows is suppressed, and the volume and the weight of the sections to be driven are reduced. A plasma processing apparatus is also disclosed. In the substrate supporting table for the plasma processing apparatus (10), a cylindrical inner tube (12), the bellows (13), an outer tube (14) and a cover member (15) are sequentially disposed concentrically from the inner side, and a drive member (21) to be driven by means of a drive mechanism (24) is attached to the rear surface of the placing table (16) through an opening (llb) and the inside of the inner tube (12).
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申请公布号 |
EP2436802(A1) |
申请公布日期 |
2012.04.04 |
申请号 |
EP20100780508 |
申请日期 |
2010.05.24 |
申请人 |
MITSUBISHI HEAVY INDUSTRIES, LTD. |
发明人 |
MATSUDA RYUICHI;YOSHIDA KAZUTO |
分类号 |
C23C16/44;H01L21/3065;H01L21/683 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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