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发明名称
摘要
申请公布号
JP4909737(B2)
申请公布日期
2012.04.04
申请号
JP20060532423
申请日期
2004.04.16
申请人
发明人
分类号
H01L21/8247;G11C11/34;G11C16/04;H01L21/28;H01L21/336;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/8247
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代理人
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