SPUTTERING APPARATUS AND FILM FORMING METHOD,申请号EP20060811300-传众专利搜索

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发明名称	SPUTTERING APPARATUS AND FILM FORMING METHOD
摘要
申请公布号	EP1939321(A4)	申请公布日期	2012.04.04
申请号	EP20060811300	申请日期	2006.10.05
申请人	ULVAC, INC.	发明人	TAKASAWA, SATORU;UKISHIMA, SADAYUKI;TANI, NORIAKI;ISHIBASHI, SATORU
分类号	C23C14/35;C23C14/08;C23C14/34;H01J37/34;H01L51/50;H05B33/10	主分类号	C23C14/35
代理机构		代理人
主权项
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