发明名称 METHOD FOR PRODUCING A SINGLE CRYSTRAL OF SEMICONDUCTOR MATERIAL
摘要 <p>A single crystal of semiconductor material is produced by a method of melting semiconductor material granules by means of a first induction heating coil on a dish with a run-off tube consisting of the semiconductor material, forming a melt of molten granules which extends from the run-off tube in the form of a melt neck and a melt waist to a phase boundary, delivering heat to the melt by means of a second induction heating coil which has an opening through which the melt neck passes, crystallizing the melt at the phase boundary, and delivering a cooling gas to the run-off tube and to the melt neck in order to control the axial position of an interface between the run-off tube and the melt neck.</p>
申请公布号 KR101132877(B1) 申请公布日期 2012.04.03
申请号 KR20090067277 申请日期 2009.07.23
申请人 发明人
分类号 C30B13/20;C30B13/28 主分类号 C30B13/20
代理机构 代理人
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