发明名称 PARTICLE BEAM DEVICE HAVING A SAMPLE HOLDER.
摘要 <p>A particle beam device and a sample receptacle apparatus, which has a sample holder, are disclosed. The sample holder is arranged in a movable fashion along at least a first axis and along at least a second axis. Furthermore, the sample holder is arranged in a rotatable fashion about a first axis of rotation and about a second axis of rotation. A first sample holding device is arranged relative to the sample holder in a rotatable fashion about a third axis of rotation, in which the third axis of rotation and the second axis of rotation are at least in part arranged laterally offset with respect to one another. Furthermore, a control apparatus is provided, in which the first sample holding device is rotatable about the third axis of rotation into an analysis position and/or treating position using the control apparatus.</p>
申请公布号 NL2007475(A) 申请公布日期 2012.04.02
申请号 NL20112007475 申请日期 2011.09.26
申请人 CARL ZEISS NTS GMBH 发明人 BIBERGER JOSEF;PULWEY RALPH
分类号 H01J37/20;H01L21/68 主分类号 H01J37/20
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