发明名称 SEMICONDUCTOR DEVICE, SEMICONDUCTOR TESTER, AND SEMICONDUCTOR TEST SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To obtain a semiconductor device capable of detecting an open failure without increasing a test cost, a semiconductor tester for testing this semiconductor device, and a semiconductor test system using this semiconductor tester. <P>SOLUTION: The semiconductor device including a plurality of pads which are electrically connected with output pins of an internal circuit, is equipped with: a first switch circuit whose one end is connected to a common potential and the other end is connected to the pad; and a multiplexer prepared between the output pins of the internal circuit and the pads to electrically connect the pad connected with the first switch circuit and the pad to be connected with a tester pin of the semiconductor tester at the testing. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012063198(A) 申请公布日期 2012.03.29
申请号 JP20100206552 申请日期 2010.09.15
申请人 YOKOGAWA ELECTRIC CORP 发明人 YOKOZEKI KATSUYOSHI;OOKA KOICHI;NAGANUMA HIDEKI
分类号 G01R31/28;H01L21/822;H01L27/04 主分类号 G01R31/28
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