发明名称 METHOD FOR FABRICATING RESISTANCE MEMORY DEVICE
摘要 A method for fabricating a resistive memory device includes forming a lower electrode including a metal nitride layer over a substrate, forming a metal oxide layer used as a variable resistance material by oxidizing a part of the metal nitride layer, and forming an upper electrode on the metal oxide layer.
申请公布号 KR101127236(B1) 申请公布日期 2012.03.29
申请号 KR20080135540 申请日期 2008.12.29
申请人 发明人
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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