发明名称 |
IN-PLACE MANAGEMENT OF SEMICONDUCTOR EQUIPMENT RECIPES |
摘要 |
Systems and methods for managing optical inspection target components are disclosed. A method may include, but is not limited to: storing at least one external recipe component at an inspection tool node; associating at least one proxy component with the at least one external recipe component; associating the at least one external recipe component with at least one optical inspection target recipe; and storing the at least one optical inspection target recipe including the at least one proxy component in a recipe distribution server. A method may include, but is not limited to: receiving a selection of at least one recipe associated with an optical inspection target to be inspected at a first inspection tool node; and determining whether one or more external recipe components associated with the recipe are stored on at least one of the first inspection tool node and a second node. |
申请公布号 |
WO2012005818(A3) |
申请公布日期 |
2012.03.29 |
申请号 |
WO2011US37771 |
申请日期 |
2011.05.24 |
申请人 |
KLA-TENCOR CORPORATION;DAVID, DOMINIC GERALD;LEE, CHRIS W. |
发明人 |
DAVID, DOMINIC GERALD;LEE, CHRIS W. |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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