| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide substrate positioning equipment capable of simply changing a fixed position of an adjusting bolt for adjusting an advance end position and a return end position of an air cylinder for each glass substrate having a size different from each other. <P>SOLUTION: Substrate positioning equipment which positions a substrate by using an air cylinder when delivering the substrate to processing equipment in a next step in the manufacturing process of the substrate, comprises the air cylinder including: adjusting bolt units provided in an advance end side and a return end side of the air cylinder, and having a plurality of adjusting bolts for adjusting an advance end position and a return end position; a plurality of sensors A for recognizing any adjusting bolt from the plurality of adjusting bolts; and a plurality of sensors B for detecting a stroke position of the air cylinder. <P>COPYRIGHT: (C)2012,JPO&INPIT |
