发明名称 BOND RING FOR A FIRST AND SECOND SUBSTRATE
摘要 The present disclosure provides a device having a plurality of bonded substrates. The substrates are bonded by a first bond ring and a second bond ring. In an embodiment, the first bond ring is a eutectic bond and the second bond ring is at least one of an organic material and a eutectic bond. The second bond ring encircles the first bond ring. The first bond ring provides a hermetic region of the device. In a further embodiment, a plurality of wafers are bonded which include a third bond ring disposed at the periphery of the wafers.
申请公布号 US2012074554(A1) 申请公布日期 2012.03.29
申请号 US20100891062 申请日期 2010.09.27
申请人 CHENG CHUN-WEN;YANG HSUEH-AN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHENG CHUN-WEN;YANG HSUEH-AN
分类号 H01L23/10;H01L21/02 主分类号 H01L23/10
代理机构 代理人
主权项
地址