发明名称 |
BOND RING FOR A FIRST AND SECOND SUBSTRATE |
摘要 |
The present disclosure provides a device having a plurality of bonded substrates. The substrates are bonded by a first bond ring and a second bond ring. In an embodiment, the first bond ring is a eutectic bond and the second bond ring is at least one of an organic material and a eutectic bond. The second bond ring encircles the first bond ring. The first bond ring provides a hermetic region of the device. In a further embodiment, a plurality of wafers are bonded which include a third bond ring disposed at the periphery of the wafers. |
申请公布号 |
US2012074554(A1) |
申请公布日期 |
2012.03.29 |
申请号 |
US20100891062 |
申请日期 |
2010.09.27 |
申请人 |
CHENG CHUN-WEN;YANG HSUEH-AN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHENG CHUN-WEN;YANG HSUEH-AN |
分类号 |
H01L23/10;H01L21/02 |
主分类号 |
H01L23/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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