SEMICONDUCTOR SWITCH ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor switch element in minute size using a metal particle.

SOLUTION: A semiconductor switch element comprises: a first insulating film 101 in which a trench 105 having a predetermined depth is provided; first wiring 103a and second wiring 103b that are provided on the first insulating film so as to face to each other with the trench therebetween; a metal particle 106 disposed in the trench so as to have a gap between the first wiring and the second wiring; a second insulating film 104 provided on the first wiring and the second wiring; and third wiring 201 provided above the metal particle.

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