| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for treating a material to be treated capable of reducing the generation amount of a specified product or sub-product, to provide a treatment apparatus used for the same, to provide a method for treating the material to be treated capable of controlling the specified product to be generated, and to provide a treatment apparatus used for the same. <P>SOLUTION: In the method for treating the material to be treated, when the material to be treated including gas whose composition is changed by temperature change is in an activated state, the material to be treated is rapidly cooled to a temperature area or below where the material to be treated is changed into a specified component, and accordingly a treatment where the holding time of the temperature area allowing the specified component to be present is reduced and the composition of the material to be treated is changed is applied. <P>COPYRIGHT: (C)2012,JPO&INPIT |
