APPARATUS FOR DIFFUSING SPACER

摘要

PURPOSE: A spacer spraying apparatus is provided to prevent a spacer from sticking to the bottom surface of a substrate in a process of spraying the spacer on the front surface of the substrate. CONSTITUTION: A chamber(110) provides a space to spray a spacer on a substrate. A spacer providing unit(130) is installed on the upper area of the chamber to spray the spacer to the substrate. A stage(120) supports the bottom surface of the substrate. A spray nozzle is formed in a compressed air providing unit(140). The spray nozzle sprays the compressed air toward the bottom surface of the substrate.