APPARATUS FOR THIN LAYER DEPOSITION, METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD

摘要

PURPOSE: A thin film deposition apparatus, an OLED(Organic Light Emitting Diode) display manufacturing method using the apparatus, and an OLED display manufactured by the method are provided to secure enough deposition over the entire substrate by employing a scanning method using relative motion of the substrate and a thin film deposition assembly. CONSTITUTION: A thin film deposition apparatus comprises a second chamber(731b) which is kept in a vacuum, two stage which are arranged in parallel inside the second chamber and hold substrates thereon, masks which are coupled to the respective substrates fixed on the stages, and an evaporation source which comprises first and second evaporators(301,302) which move above the stages and emit deposited materials onto the substrates.