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发明名称
PROCESS CHAMBER WITH IMPROVED DEPOSITION AND CLEANING EFFICIENCY
摘要
申请公布号
KR101127026(B1)
申请公布日期
2012.03.26
申请号
KR20050053703
申请日期
2005.06.21
申请人
发明人
分类号
H01L21/205;H01L21/3065
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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