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发明名称
METAL COMPOUND, THIN FILM-FORMING MATERIAL, AND METHOD FOR PRODUCING THIN FILM
摘要
申请公布号
KR101128542(B1)
申请公布日期
2012.03.23
申请号
KR20077009222
申请日期
2005.10.26
申请人
发明人
分类号
C07F9/00;C07F19/00;C23C16/40;H01L21/285
主分类号
C07F9/00
代理机构
代理人
主权项
地址
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